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| 003 | NLI | ||
| 005 | 20210602181308.0 | ||
| 008 | 110113s2006 fluda e 000 0 eng | ||
| 020 |
_a0849391377 _c£49.99 |
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| 041 | 0 | _aeng | |
| 044 | _aflu | ||
| 082 | 0 |
_a621.381 _222 |
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| 245 | 0 | 4 |
_aThe MEMS handbook/ _cedited by Mohamed Gad-el-Hak |
| 250 | 0 | 0 | _a2nd ed |
| 260 |
_aBoca Raton, Fla. : _bCRC, _c2006 |
||
| 300 |
_a3 v. : _bill. (some col.); _c27 cm. |
||
| 440 | 0 |
_aMechanical engineering series _945925 |
|
| 500 | 0 | _aLib. has v.1 | |
| 504 | _aIncludes bibliogrphical references and index | ||
| 505 | _aV. MEMS: Introduction and fundamentals -- 1 v (various pagings) .- v.2. MEMS : Design and fabrication .- v.3. MEMS : Applications | ||
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 |
_aNanotechnology _9196114 |
|
| 700 | 0 |
_aMohamed Gad-el-Hak, 4/edt _9565518 |
|
| 887 | _aUma jgs | ||
| 901 |
_a556941 : _b16.08.07 |
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| 902 | _aE/O 621.381 M 464 | ||
| 904 | _aUma | ||
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