Handbook of microlithography, micromachining and microfabrication / edited by P. Rai-Choudhury

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Material type: Text

TextLanguage: English Series: IEE materials and devices series ; 12A-12BPublication details: Bellingham, Wash. : SPIE Optical Engineering Press, 1997Description: 2 v. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Materials specified	Status	Date due	Barcode	Item holds
Books	National Library of India New English Oversized - Main Stack Division	New English Oversized	E/O 670 H 191 (Browse shelf(Opens below))		Available		PUR000533106ENG

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Includes bibliographical references and index

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