Metal imporities in Silicon device fabrication/ Klaus Graff

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Material type: Text

TextLanguage: English Series: Springer series in materials sciencePublication details: Germany: Springer, c1995Description: ix, 216 p.: ill.; 23 cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Materials specified	Status	Date due	Barcode	Item holds
Books	National Library of India New English - Main Stack Division	New English	E 621.3815 G 758 (Browse shelf(Opens below))		Available		PUR000525902ENG

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Includes index

Bibliography: p. 201-214

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