TY - BOOK AU - Behrisch,Rainer ED - International Conference on Ion Surface Interaction, Sputtering and Related Phenomena TI - Ion surface interaction, sputtering and related phenomena SN - 0677158505 : U1 - 539.72063 PY - 1973/// CY - New York PB - Gordon and Breach Science Publishers KW - Ions KW - Scattering KW - Congresses KW - Ion bombardment KW - Sputtering (Physics) KW - Electrons KW - Emission N1 - Proceedings of the international conference held at Garching, Munich, Germany, September 24-27, 1972; Includes index ER -