TY - BOOK AU - Kumar,N.Phani TI - Principle's of nanotechnology: materials, tools and process at nanoscale SN - 9788183713337 (pbk) U1 - 620.5 22 PY - 2010/// CY - Chennai PB - SciTech Pub KW - Nanotechnology N1 - Includes bibliographical references and index ER -