Buchler, Martin G. <br/><br/>
Microelectronic test pattern NBS-3 for evaluating the resistivity-dopart density relationship of silicon / 
Martin G. Buchler 
 - Washington, D. C. :  United States Government Printing Office,  1976 
 - vi, 49 p. ;  26 cm. 
<br/><br/> At the head of the title : Semiconductor measurment technology 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Electronic circuits<br/>Electronics
<br/><br/><label>Dewey Class. No.: </label>621.3815