TY  - BOOK
AU  - Crowder,Billy L.
ED  - International Conference on Ion Implantation in Semiconductors and Other Materials
TI  - Ion implantation in semiconductors and other materials: [proceedings] 
SN  - 0306307561
U1  - 537.622063 
PY  - 1973///
CY  - New York
PB  - Plenum Press
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -