Ion implantation in semiconductors and other materials :  [proceedings] / 
edited by Billy L. Crowder 
 - New York :  Plenum Press,  c1973 
 - xii, 657 p. :  ill. ;  25 cm. 
 - The IBM research symposia series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0306307561 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation--Congresses<br/>Semiconductors--Congresses
<br/><br/><label>Dewey Class. No.: </label>537.622063