TY  - SER
AU  - Whitehouse,David J.
TI  - Handbook of surface and nanometrology
SN  - 0750305835
U1  - 620.44 22
PY  - 2003///
CY  - Bristol
PB  - Institute of Physics
KW  - Nanoscience
KW  - Handbooks, manuals, etc
KW  - Surfaces (Technology)
KW  - Analysis
N1  - Includes bibliographical references and index; Glossary : p.1104-1117
ER  -