TY - BOOK AU - Shaw,D. TI - Atomic diffusion in semiconductors SN - 0306304554 : U1 - 537.622 PY - 1973/// CY - London PB - Plenum Press KW - Semiconductors KW - Diffusion KW - Thermal properties KW - Crystals KW - Defects N1 - Errata slip inserted; Includes bibliographical references and index ER -