TY  - BOOK
AU  - Chui,Benjamin W.
TI  - Microcantilevers for atomic force microscope data storage
SN  - 0792383583
U1  - 502.82 
PY  - 1999///
CY  - Boston, Mass
PB  - Kluwer Academic Publishers
KW  - Optical storage devices
KW  - Scanning electron microscopes
KW  - Atomicforce microscopy
N1  - Includes bibliographical references and index
ER  -