Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell 
 - New York :  Oxford University Press,  c1996 
 - xv, 536 p. :  ill. ;  25 cm. 
 - Oxford series in electrical engineering .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0195105087 :  Rs. 450.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152