TY  - BOOK
AU  - Ukita,H.
TI  - Micromechanical photonics
SN  - 3540313338
U1  - 621.381 22
PY  - 2006///
CY  - Berlin
PB  - Springer
KW  - Systems biology
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Photonics
N1  - Includes index; References : p. 227-242
ER  -