Ukita, H. <br/><br/>
Micromechanical photonics/ 
H. Ukita 
 - Berlin :  Springer,  c2006 
 - xi, 250 p. :  ill.(some col.);  25 cm. 
 - Microtechnology and MEMS .
<br/><br/> Includes index 
<br/><br/>References : p. 227-242 
<br/><br/><label>ISBN: </label>3540313338  E99.95 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Systems biology<br/>Microelectronics<br/>Microelectromechanical systems<br/>Photonics
<br/><br/><label>Dewey Class. No.: </label>621.381