TY  - BOOK
AU  - Mohamed Gad-el-Hak,  4/edt
TI  - The MEMS handbook
SN  - 0849391377
U1  - 621.381 22
PY  - 2006///
CY  - Boca Raton, Fla.
PB  - CRC
KW  - Microelectronics
KW  - Nanotechnology
N1  - Lib. has v.1; Includes bibliogrphical references and index; V. MEMS: Introduction and fundamentals -- 1 v (various pagings) .- v.2. MEMS : Design and fabrication .- v.3. MEMS : Applications
ER  -