The MEMS handbook - Mohamed Gad-el-Hak, 4/edt (Boca Raton, Fla. : CRC, 2006)
V. MEMS: Introduction and fundamentals -- 1 v (various pagings) .- v.2. MEMS : Design and fabrication .- v.3. MEMS : Applications
Lib. has v.1
Includes bibliogrphical references and index
Keywords: Microelectronics; Nanotechnology