The MEMS handbook/ 
edited by Mohamed Gad-el-Hak 
 - 2nd ed 
 - Boca Raton, Fla. :  CRC,  2006 
 - 3 v. :  ill. (some col.);  27 cm. 
 - Mechanical engineering series .
<br/><br/> Lib. has v.1 
<br/><br/>Includes bibliogrphical references and index 
<br/><br/>V. MEMS: Introduction and fundamentals -- 1 v (various pagings) .- v.2. MEMS : Design and fabrication .- v.3. MEMS : Applications 
<br/><br/><label>ISBN: </label>0849391377  £49.99 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>621.381