TY  - BOOK
AU  - Setter,Nava
TI  - Electroceramic-based MEMS: fabrication-technology and applications
SN  - 0387233105
U1  - 621.381 22
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
N1  - Inludes bibliographical references and index
ER  -