Electroceramic-based MEMS :  fabrication-technology and applications/ 
edited by Nava Setter 
 - New York :  Springer,  c2005 
 - xii, 414 p. :  ill.;  25 cm. 
 - Electronic materials : Science and Technology .
<br/><br/>Inludes bibliographical references and index 
<br/><br/><label>ISBN: </label>0387233105  Euro109.95 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381