TY  - BOOK
AU  - Gianchandani,Yogesh B.
AU  - Tabata,Osamu
AU  - Zappe,Hans
TI  - Comprehensive microsystems
SN  - 9780444521941
U1  - 621.381 22
PY  - 2008///
CY  - Amsterdam, The Netherlands
PB  - Elsevier
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; v.1. Materials fabrication and packaging electronics and systems design. - xxi, 583 p. -- v.2. Actuation mechanism physical sensing chemical and biological systems. - xx, 583 p. -- v.3. Optical systems industrial applications emerging topics. - xx, 737 p
ER  -