Comprehensive microsystems - Gianchandani, Yogesh B.; Tabata, Osamu; Zappe, Hans (Amsterdam, The Netherlands : Elsevier, 2008)
v.1. Materials fabrication and packaging electronics and systems design. - xxi, 583 p. -- v.2. Actuation mechanism physical sensing chemical and biological systems. - xx, 583 p. -- v.3. Optical systems industrial applications emerging topics. - xx, 737 p.
Includes bibliographical references and index
Keywords: Microelectromechanical systems