Comprehensive microsystems/ 
eds. Yogesh B. Gianchandani, Osamu Tabata [and] Hans Zappe 
 - Amsterdam, The Netherlands :  Elsevier,  c 2008 
 - 3v. :  chiefly col ill., ports;  27 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>v.1. Materials fabrication and packaging electronics and systems design. - xxi, 583 p. -- v.2. Actuation mechanism physical sensing chemical and biological systems. - xx, 583 p. -- v.3. Optical systems industrial applications emerging topics. - xx, 737 p. 
<br/><br/><label>ISBN: </label>9780444521941  $1840.00 ( set of 3 vols.) 9780444521910 (v.1) 9780444521927 (v.2) 9780444521934 (v.3) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381