TY - BOOK AU - Saliterman,Steven S. TI - Fundamentals of bioMEMS and medical microdevices SN - 0819459771 U1 - 610.28 22 PY - 2006/// CY - Bellingham, Wash. PB - SPIE Press KW - Nanotechnology KW - Biotechnology KW - Microelectromechanical systems N1 - Glossary: p. 561-594; Includes bibliographical references and index ER -