EUV sources for lithography/ 
[ed] Vivek Bakshi 
 - Bellingham, Wash. :  SPIE Press,  c2006 
 - xxxv, 1057 p. :  ill., ports.;  27 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0819458457  $150.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ultraviolet radiation--Industrial applictions<br/>Plasma (Ionized gases)<br/>Lithography
<br/><br/><label>Dewey Class. No.: </label>621.364