TY  - BOOK
AU  - Grigoropoulos,Costas P.
TI  - Transport in laser microfabrication: fundamentals and applications
SN  - 9780521821728
U1  - 621.366 22
PY  - 2009///
CY  - Cambridge
PB  - The University Press
KW  - Lasers
KW  - Microfabrication
N1  - Includes bibliographical references and index
ER  -