TY  - BOOK
AU  - Franz,Gerhard
TI  - Low pressure plasmas and microstructuring technology
SN  - 9783540858485
U1  - 621.044 22
PY  - 2009///
CY  - Heidelberg
PB  - Springer
KW  - Plasma (Ionized gases)
KW  - Industrial applications
KW  - Plasma engineering
KW  - Plasma etching
N1  - Includes bibliographical references and index
ER  -