Franz, Gerhard <br/><br/>
Low pressure plasmas and microstructuring technology/ 
Gerhard Franz 
 - Heidelberg :  Springer,  c2009 
 - xxiv, 732p. :  ill.;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783540858485  Euro149.95 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma (Ionized gases)--Industrial applications<br/>Plasma engineering<br/>Plasma etching
<br/><br/><label>Dewey Class. No.: </label>621.044