TY  - SER
AU  - Korvink,J.G.
AU  - Paul,Oliver
TI  - MEMS: a practical guide to design, analysis, and applications
SN  - 0815514972
U1  - 621 22
PY  - 2006///
CY  - Norwich, N.Y.
PB  - William Andrew pub.
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -