MEMS :  a practical guide to design, analysis, and applications/ 
edited by Jan G. Korvink and Oliver Paul 
 - Norwich, N.Y. :  William Andrew pub.,  c2006 
 - xxv, 965 p. :  ill.;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0815514972  Euro249.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621