TY  - BOOK
AU  - Mahalik,Nitaigour Premchand
TI  - MEMS
SN  - 0070634159 (pbk)
U1  - 621.381 22
PY  - 2007///
CY  - New Delhi
PB  - Tata McGraw-Hill Education
KW  - Microelectromechanical systems
KW  - MEMS
N1  - Includes bibliographical references and index
ER  -