TY  - BOOK
AU  - Mahan,John E.
TI  - Physical vapor deposition of thin films
SN  - 0471330019
U1  - 671.735 
PY  - 2002///
CY  - New York
PB  - John Wiley Interscience Pub.
KW  - Vapor plating
KW  - Thin films
KW  - Vacuum technology
N1  - Includes index
ER  -