Mahan, John E. Physical vapor deposition of thin films/ John E. Mahan - New York: John Wiley Interscience Pub., c2002 - xiii, 312 p.; 23 cm. Includes index ISBN: 0471330019 $ 84.95 Subjects--Topical Terms: Vapor platingThin filmsVacuum technology Dewey Class. No.: 671.735