TY  - BOOK
AU  - Setter,N.
TI  - Electroceramic-based MEMS: fabrication-technology and applications 
SN  - 0387233105 :
U1  - 621.381 
PY  - 2005///
CY  - New York
PB  - Springer Science+Business Media
KW  - Microelectromechanical systems
N1  - Includes index
ER  -