Electroceramic-based MEMS :  fabrication-technology and applications / 
edited by Nava Setter 
 - New York :  Springer Science+Business Media,  c2005 
 - xii, 414 p. :  ill. ;  25 cm. 
 - The Kluwer international series in: Electronic materials: science and technology ;  9 .
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>0387233105 :  Rs. 109.95 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381