TY  - BOOK
AU  - Bechtold,T.
AU  - Korvink,J.G.
AU  - Rudnyi,E.B.
TI  - Fast simulation of electro-thermal MEMS: efficient dynamic compact models 
SN  - 9783540346128 :
U1  - 621.31243 
PY  - 2007///
CY  - Berlin
PB  - Springer
KW  - Microelectromechanical systems
KW  - Mathematical models
N1  - Includes index
ER  -