Bechtold, T. Fast simulation of electro-thermal MEMS : efficient dynamic compact models / T. Bechtold, E.B. Rudnyi and J.G. Korvink - Berlin : Springer, 2007 - xi, 180 p. : ill. (some col.) ; 24 cm. - Microtechnology and MEMS 1439-6599 . Includes index ISBN: 9783540346128 : Rs. 99.95 Subjects--Topical Terms: Microelectromechanical systems--Mathematical models Dewey Class. No.: 621.31243