TY  - BOOK
AU  - Rai-Choudhury,P.
TI  - Handbook of microlithography, micromachining and microfabrication
SN  - 0852969066 :
U1  - 670 
PY  - 1997///
CY  - Bellingham, Wash.
PB  - SPIE Optical Engineering Press
KW  - Microlithography
KW  - Handbooks, manuals, etc
KW  - Micromachining
KW  - Microfabrication
N1  - Library has v.1; Includes bibliographical references and index
ER  -