Handbook of microlithography, micromachining and microfabrication - Rai-Choudhury, P. (Bellingham, Wash. : SPIE Optical Engineering Press, 1997)
Library has v.1
Includes bibliographical references and index
Keywords: Microlithography -- Handbooks, manuals, etc; Micromachining -- Handbooks, manuals, etc; Microfabrication -- Handbooks, manuals, etc