Handbook of microlithography, micromachining and microfabrication / 
 Microlithography, micromachiningand microfabrication 
edited by P. Rai-Choudhury 
 - Bellingham, Wash. :  SPIE Optical Engineering Press,  1997 
 - 2 v. :  ill. ;  26 cm. 
 - IEE materials and devices series ;  12A-12B .
<br/><br/> Library has v.1 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0852969066 :  USD 150.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography--Handbooks, manuals, etc.<br/>Micromachining--Handbooks, manuals, etc.<br/>Microfabrication--Handbooks, manuals, etc.
<br/><br/><label>Dewey Class. No.: </label>670