TY  - BOOK
AU  - Ukita,H.
TI  - Micromechanical photonics
SN  - 3540313338 :
U1  - 621.381 
PY  - 2006///
CY  - Berlin
PB  - Springer-Verlag
KW  - Photonics
KW  - Microelectronics
KW  - Microelectromechanical systems
ER  -