Ukita, H. <br/><br/>
Micromechanical photonics / 
H. Ukita 
 - Berlin :  Springer-Verlag,  c2006 
 - xi, 250 p. :  ill. ;  25 cm. 
 - Microtechnology and MEMS  1615-8326 .
<br/><br/><label>ISBN: </label>3540313338 :  EURO 99.95 9783540313335 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Photonics<br/>Microelectronics<br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381