TY  - BOOK
AU  - Susumu Namba,
ED  - International Conference on Ion Implantation in Semiconductors and Other Materials
TI  - Ion implantation in semiconductors: science and technology :  
SN  - 030630841X :
U1  - 621.3815063 
PY  - 1975///
CY  - New York
PB  - Plenum Press
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductors
KW  - Effect of radiation on
KW  - Metals
N1  - Includes index; Proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974
ER  -