Ion implantation in semiconductors : science and technology : /
edited by Susumu Namba
- New York : Plenum Press, 1975
- xv, 742 p. : ill. ; 26 cm.
Includes index Proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974
030630841X : USD 49.00
Ion implantation--Congresses Semiconductors--Effect of radiation on--Congresses Metals--Effect of radiation on--Congresses