TY  - BOOK
AU  - Hoffman,Dorothy M.
AU  - Bawa Singh,
AU  - Thomas,John H., III
TI  - Hand - book of vacuum science and technology
SN  - 0123520657
U1  - 621.55 
PY  - 1998///
CY  - London
PB  - Academic Press
KW  - Vacuum technology
KW  - Handbooks, manuals, etc
KW  - Vacuum
N1  - Includes bibliographical references and index
ER  -