TY  - BOOK
AU  - Graff,Klaus
TI  - Metal imporities in Silicon device fabrication
SN  - 0387583173
U1  - 621.3815 
PY  - 1995///
CY  - Germany
PB  - Springer
KW  - Semiconductors
KW  - Defects
KW  - Silicon
KW  - Inclusions
N1  - Includes index; Bibliography: p. 201-214
ER  -