Graff, Klaus <br/><br/>
Metal imporities in Silicon device fabrication/ 
Klaus Graff 
 - Germany:  Springer,  c1995 
 - ix, 216 p.:  ill.;  23 cm. 
 - Springer series in materials science .
<br/><br/> Includes index 
<br/><br/>Bibliography: p. 201-214 
<br/><br/><label>ISBN: </label>0387583173  Dm 118.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Defects<br/>Silicon--Inclusions<br/>Silicon--Defects
<br/><br/><label>Dewey Class. No.: </label>621.3815