TY  - BOOK
AU  - Castellano,Robert N.
TI  - Semiconductor device processing: technology trends in the VLSI era
SN  - 2881245161
U1  - 621.38152 
PY  - 1993///
CY  - Philadelphia
PB  - Gordon and Breach Science Pub
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Electronic circuit design
N1  - Includes index
ER  -