Castellano, Robert N. <br/><br/>
Semiconductor device processing:  technology trends in the VLSI era/ 
Robert N. Castellano 
 - Philadelphia:  Gordon and Breach Science Pub,  c1993 
 - xiv, 234 p.;  23 cm. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>2881245161  $ 43.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Integrated circuits--Very large scale integration--Design and construction<br/>Electronic circuit design
<br/><br/><label>Dewey Class. No.: </label>621.38152