TY  - BOOK
AU  - Radha Krishnan,M.
ED  - Seminar on Thin Film Micro Electronics
TI  - Thin film micro electronics: proceeding
U1  - 621.38171 
PY  - 1980///
CY  - Madras
PB  - University of Madras
KW  - Thin - film circuits
KW  - Micro electronics
KW  - Integrated circuits
KW  - Thin film devices
KW  - Thin films
ER  -