TY  - GEN
AU  - Kim Eun  Sok
TI  - Fundamentals of Microelectromechanical Systems (MEMS)
SN  - 9789354601224
U1  - E 621 23 ed.
PY  - 2021///
CY  - New York
PB  - McGraw Hill Education (India)
KW  - Microelectromechanical system
ER  -